The center for micro-nano fabrication and advanced characterization(CFC) is one of the important components of Tan Kah Kee Innovation Laboratory (IKKEM), which provides experimental environment conditions, state-of-the-art facilities and technical support for frontier research and technology breakthroughs. CFC consists of six functional platforms including the first noise-free ultra-precision lab in China, micro-nano fabrication platform, in-situ electron microscopy platform, spectroscopy and nano imaging platform, intelligent computing platform, and ultra-drying room. The platform now provides various energy resolution spectral characterization, qualitative and quantitative detection, structure determination, micro-nano fabrication and characterization for IKKEM and non-IKKEM users. Supports.

Ultra-Precision Lab

Providing state-of-art sensitivity and resolution under measurement and processing conditions

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Micro-Nano Fabrication Platform

One-stop integrating thin film deposition, pattern fabrication, micro-nano characterization and packaging integration

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In-Situ Electron Microscopy Platform

In-situ Analysis&Testing Center,Exploring New Ways to Improve the Performance of Energy Materials

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Spectroscopy and Nano-Imaging Platform

Covering structure and composition analysis, property characterization and performance testing, providing technical support for R&D of new energy materials

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